![](/img/cover-not-exists.png)
[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Collapse Mechanisms for High Aspect Ratio Structures with Application to Clean Processing
Peter, Daniel, Holsteyns, Frank, Dalmer, Michael, Kruwinus, Hans, Lechner, Alfred, Bensch, WolfgangYear:
2009
Language:
english
DOI:
10.1149/1.3202659
File:
PDF, 479 KB
english, 2009