SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - XeCl Laser Ablation Of Organic Polymers: Characterization Of Debris And Its Effect On Surface Morphology
Singleton, Donald L., Paraskevopoulos, George, Irwin, Robert S., Taylor, Roderick S., Leopold, Kurt E., Pirri, Anthony N., Piwczyk, Bernhard P.Volume:
998
Year:
1988
Language:
english
DOI:
10.1117/12.960210
File:
PDF, 8.36 MB
english, 1988