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[ECS Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007) - Munich, Germany (September 13 - September 14, 2007)] ECS Transactions - Thin Film Analysis and Model Interface Characterization Studies of Relevance to Microelectronics
Dontas, Ioannis, Papaefthimiou, Vasiliki, Kennou, Styliani, Ladas, SpyridonVolume:
10
Year:
2007
Language:
english
DOI:
10.1149/1.2773977
File:
PDF, 559 KB
english, 2007