Highly Stable ZnO Thin Films by Atomic Layer Deposition

Japanese Journal of Applied Physics 1998 / 10 Vol. 37; Iss. Part 2, No

Highly Stable ZnO Thin Films by Atomic Layer Deposition

Sang, Baosheng, Yamada, Akira, Konagai, andMakoto
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Volume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.L1125
Date:
October, 1998
File:
PDF, 66 KB
english, 1998
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