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SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II - Control chart design strategies for skewed data
Mandraccia, Steven T., Halverson, Galen D., Chou, Youn-Min, Iturralde, Armando, Lin, Te-HuaVolume:
2876
Year:
1996
Language:
english
DOI:
10.1117/12.250904
File:
PDF, 289 KB
english, 1996