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Effect of Surface Treatment of Gate-Insulator on Uniformity of Bottom-Gate ZnO Thin Film Transistors
Furuta, Mamoru, Nakanishi, Takashi, Kimura, Mutsumi, Hiramatsu, Takahiro, Matsuda, Tokiyoshi, Furuta, Hiroshi, Kawaharamura, Toshiyuki, Li, Chaoyang, Hirao, TakashiVolume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3290741
File:
PDF, 466 KB
english, 2010