[ASME ASME 2012 International Mechanical Engineering Congress and Exposition - Houston, Texas, USA (Friday 9 November 2012)] Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B - Substrate Effect on Modulus of Elasticity and Hardness of Thin Film Under Nanoindentation Test
Ahmed, Mesbah U., Tarefder, Rafiqul A.Year:
2012
Language:
english
DOI:
10.1115/IMECE2012-89497
File:
PDF, 945 KB
english, 2012