[ECS 212th ECS Meeting - Washington, DC (October 7 -...

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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Structural and Morphological Properties of Nitrogen Doped Polysilicon for Advanced Gate Material

Woo, Sang Ho, Kim, Yil Wook, Um, Pyung Yong, Kim, Hai Won, Cho, Sung Kil, Choe, Hyung Su, Lee, Dong Keun, Kim, Chang-Koo
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Volume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779594
File:
PDF, 407 KB
english, 2007
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