Quality and Growth Rate of Hot-wire Chemical Vapor Deposition Epitaxial Si Layers
Teplin, Charles W, Martin, Ina T., Jones, Kim M., Young, David, Romero, Manuel J., Reedy, Robert C., Branz, Howard M., Stradins, PaulVolume:
1066
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1066-A11-06
Date:
January, 2008
File:
PDF, 222 KB
english, 2008