Microfabrication of Si 3 N...

Microelectronics International 2015 / 01 Vol. 32; Iss. 1

Microfabrication of Si 3 N 4 -polyimide membrane for thermo-pneumatic actuator

Abdul Hamid, Norihan, Yunas, J., Yeop Majlis, B., Hamzah, A.A., Bais, B.
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Volume:
32
Language:
english
Journal:
Microelectronics International
DOI:
10.1108/MI-04-2014-0015
Date:
January, 2015
File:
PDF, 304 KB
english, 2015
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