![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Alternative Lithographic Technologies VI - Understanding defects in DSA: calculation of free energies of block copolymer DSA systems via thermodynamic integration of a mesoscale block-copolymer model
Resnick, Douglas J., Bencher, Christopher, Peters, Andrew J., Lawson, Richard A., Nation, Benjamin D., Ludovice, Peter J., Henderson, Clifford L.Volume:
9049
Year:
2014
Language:
english
DOI:
10.1117/12.2046664
File:
PDF, 702 KB
english, 2014