SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

  • Main
  • SPIE Proceedings [SPIE SPIE Advanced...

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Alternative Lithographic Technologies VI - Understanding defects in DSA: calculation of free energies of block copolymer DSA systems via thermodynamic integration of a mesoscale block-copolymer model

Resnick, Douglas J., Bencher, Christopher, Peters, Andrew J., Lawson, Richard A., Nation, Benjamin D., Ludovice, Peter J., Henderson, Clifford L.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
9049
Year:
2014
Language:
english
DOI:
10.1117/12.2046664
File:
PDF, 702 KB
english, 2014
Conversion to is in progress
Conversion to is failed