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Silicon Single Crystal Growth from a Melt: On the Impact of Dopants on the v/G Criterion
Vanhellemont, J., Kamiyama, E., Sueoka, K.Volume:
2
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.024304jss
Date:
February, 2013
File:
PDF, 1.14 MB
english, 2013