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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - (Invited) Equivalent Oxide Thickness Correction in the High-k/In
Hurley, Paul K., Long, Rathnait, O'Regan, Terrance, O'Connor, Eamon, Monaghan, Scott, Djara, Vladimir, Negara, M. Adi, O'Mahony, Aileen, Povey, Ian, Blake, Alan, Nagle, Roger, O'Connell, Dan, Pemble,Year:
2010
Language:
english
DOI:
10.1149/1.3481632
File:
PDF, 430 KB
english, 2010