Transport of and deposition from hydrocarbon radicals in a flow tube downstream from a CH4 RF discharge
A.E. Gorodetsky, I.I. Arkhipov, R.Kh. Zalavutdinov, A.P. Zakharov, Yu.N. Tolmachev, S.P. Vnukov, V.L. BukhovetsVolume:
290-293
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0022-3115(00)00483-9
File:
PDF, 185 KB
english, 2001