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Silicon diffusion in amorphous carbon films
E. Vainonen-Ahlgren, T. Ahlgren, L. Khriachtchev, J. Likonen, S. Lehto, J. Keinonen, C.H. WuVolume:
290-293
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0022-3115(00)00564-x
File:
PDF, 92 KB
english, 2001