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Unified analytic representation of physical sputtering yield
R.K. Janev, Yu.V. Ralchenko, T. Kenmotsu, K. HosakaVolume:
290-293
Year:
2001
Language:
english
Pages:
3
DOI:
10.1016/s0022-3115(00)00612-7
File:
PDF, 86 KB
english, 2001