Sputtering of amorphous C:H and C/B:H layers by argon ions
E. Pasch, P. Bogen, Ph. MertensVolume:
196-198
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/s0022-3115(06)80196-0
File:
PDF, 321 KB
english, 1992