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Spectroscopic measurement of kinetic energy of sputtered boron in electron cyclotron resonance plasma
Yoshifumi Ito, Noboru Nakano, Tutomu Yoshidome, Michiro Isobe, Masahiro NishikawaVolume:
241-243
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0022-3115(97)80205-x
File:
PDF, 406 KB
english, 1997