Uranium dioxide reaction in CF4/O2 RF plasma
Yong-soo Kim, Jin-young Min, Ki-kwang Bae, Myung-seung YangVolume:
270
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0022-3115(98)00906-4
File:
PDF, 242 KB
english, 1999