Chemical inertness of Ta–Si–N coatings in glass molding

Thin Solid Films 2015 / 06 Vol. 584

Chemical inertness of Ta–Si–N coatings in glass molding

Chen, Yung-I, Cheng, Yu-Ru, Chang, Li-Chun, Lu, Tso-Shen
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Volume:
584
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.12.040
Date:
June, 2015
File:
PDF, 1.31 MB
english, 2015
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