Pattern transfer with stabilized nanoparticle etch masks

Nanotechnology 2013 / 03 Vol. 24; Iss. 8

Pattern transfer with stabilized nanoparticle etch masks

Hogg, Charles R, Picard, Yoosuf N, Narasimhan, Amrit, Bain, James A, Majetich, Sara A
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Volume:
24
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/24/8/085303
Date:
March, 2013
File:
PDF, 2.78 MB
english, 2013
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