Design and fabrication of a highly symmetrical capacitive...

Journal of Micromechanics and Microengineering 2001 / 01 Vol. 11; Iss. 1

Design and fabrication of a highly symmetrical capacitive triaxial accelerometer

Li, Gang, Li, Zhihong, Wang, Congshun, Hao, Yilong, Li, Ting, Zhang, Dacheng, Wu, Guoying
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Volume:
11
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/11/1/308
Date:
January, 2001
File:
PDF, 1019 KB
english, 2001
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