Ultra-sensitive, highly reproducible film stress characterization using flexible suspended thin silicon plates and local curvature measurements
Tang, Yu Jie, Chen, Jing, Huang, Yu Bo, Li, Da Chao, Wang, Sha Sha, Li, Zhi Hong, Zhang, Wen DongVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/10/001
Date:
October, 2007
File:
PDF, 794 KB
english, 2007