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Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators
Tsai, Jui-che, Lu, Li-Cheng, Hsu, Wei-Chi, Sun, Chia-Wei, Wu, Ming CVolume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/1/015015
Date:
January, 2008
File:
PDF, 1.12 MB
english, 2008