Optical Characterization of Amorphous Hydrogenated Carbon...

Plasma Science and Technology 2015 / 06 Vol. 17; Iss. 6

Optical Characterization of Amorphous Hydrogenated Carbon (a-C:H) Thin Films Prepared by Single RF Plasma Method

Mansuroglu, Dogan, Goksen, Kadir, Bilikmen, Sinan
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Volume:
17
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/17/6/09
Date:
June, 2015
File:
PDF, 893 KB
english, 2015
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