Polysilicon nanogap fabrication using a thermal oxidation...

Microelectronics International 2012 / 01 Vol. 29; Iss. 1

Polysilicon nanogap fabrication using a thermal oxidation process

Dhahi, T.S., Hashim, U., Ali, M.E., Taib, Nazwa
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Volume:
29
Language:
english
Journal:
Microelectronics International
DOI:
10.1108/13565361211219167
Date:
January, 2012
File:
PDF, 239 KB
english, 2012
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