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[IEEE European Workshop Materials for Advanced Metallization. MAM'97 Abstracts Booklet - Villard de Lans, France (1997.03.16-1997.03.19)] European Workshop Materials for Advanced Metallization, - Properties of tungsten silicide thin films obtained by magnetron sputtering of composite cast targets
Glebovsky, V.G., Ermolov, S.N., Motuzenko, V.N., Shtinov, E.D.Year:
1997
Language:
english
DOI:
10.1109/mam.1997.621107
File:
PDF, 184 KB
english, 1997