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SPIE Proceedings [SPIE Fibers '92 - Boston, MA (Tuesday 8 September 1992)] Integrated Optics and Microstructures - Electrostatically actuated integrated optical nanomechanical devices
Pliska, Paul, Lukosz, Walter, Tabib-Azar, Massood, Polla, Dennis L.Volume:
1793
Year:
1993
Language:
english
DOI:
10.1117/12.141224
File:
PDF, 618 KB
english, 1993