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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII - MEMS tactile display: from fabrication to characterization
Shea, Herbert R., Ramesham, Rajeshuni, Miki, Norihisa, Kosemura, Yumi, Watanabe, Junpei, Ishikawa, HiroakiVolume:
8975
Year:
2014
Language:
english
DOI:
10.1117/12.2044127
File:
PDF, 477 KB
english, 2014