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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Microelectronic Structures and MEMS for Optical Processing IV - Optical coupling analysis and vibration characterization for packaging of 2X2 MEMS vertical torsion mirror switches
Huang, Long-Sun, Lee, Shi-sheng, Motamedi, M. Edward, Wu, Ming C., Kim, Chang-Jin, Motamedi, M. Edward, Herzig, Hans PeterVolume:
3513
Year:
1998
Language:
english
DOI:
10.1117/12.324267
File:
PDF, 1.82 MB
english, 1998