SPIE Proceedings [SPIE Third International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering - St. Petersburg, Russia (Monday 7 June 1999)] Third International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering - Statistical many-dimensional simulation of VLSI technology based on response surface methodology
Kazitov, Maxim V., Kuzmicz, Wieslaw B., Nelayev, Vladislav V., Stempitsky, Viktor R., Melker, Alexander I.Volume:
4064
Year:
2000
Language:
english
DOI:
10.1117/12.375423
File:
PDF, 239 KB
english, 2000