![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Photonics Technologies for Robotics, Automation, and Manufacturing - Providence, RI (Monday 27 October 2003)] Two- and Three-Dimensional Vision Systems for Inspection, Control, and Metrology - The use of holographic and diffractive optics for optimized machine vision illumination for critical dimension inspection
Lizotte, Todd E., Ohar, Orest, Batchelor, Bruce G., Hugli, HeinzVolume:
5265
Year:
2004
Language:
english
DOI:
10.1117/12.512000
File:
PDF, 205 KB
english, 2004