Estimation of Damage Induced by Focused Ga Ion Beam...

Japanese Journal of Applied Physics 1993 / 12 Vol. 32; Iss. Part 1, No

Estimation of Damage Induced by Focused Ga Ion Beam Irradiation

Yamamoto, Takahiro, Yanagisawa, Junichi, Gamo, Kenji, Takaoka, Sadao, Murase, Kazuo
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.32.6268
Date:
December, 1993
File:
PDF, 936 KB
1993
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