Investigation of Mg Diffusion in Ta(N) Based Electrodes on...

ECS Transactions 2013 / 03 Vol. 50; Iss. 4

Investigation of Mg Diffusion in Ta(N) Based Electrodes on HfO2 for Sub-32nm CMOS Gate-Last Transistors

Gassilloud, R., Maunoury, C., Leroux, C., Chevalier, P., Veillerot, M., Dressler, C., Aussenac, F., Martin, F., Maitrejean, S.
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Volume:
50
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/05004.0177ecst
Date:
March, 2013
File:
PDF, 364 KB
english, 2013
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