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Electroplated Cu and Sputtered Ta Crystallographic Texture Degradation in Cu/Ta/SiOF Layered Structures
Lee, Kyoung-Woo, Lee, Seoghyeong, Park, Jong-WanVolume:
148
Year:
2001
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1345874
File:
PDF, 784 KB
english, 2001