Crystal Quality Evaluation by Electrochemical Preferential Etching of p-Type SiC Crystals
Kayambaki, M., Tsagaraki, K., Cimalla, V., Zekentes, K., Yakimova, R.Volume:
147
Year:
2000
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1393599
File:
PDF, 820 KB
english, 2000