The Use of Unsaturated Fluorocarbons for Dielectric Etch...

Journal of The Electrochemical Society 2002 Vol. 149; Iss. 4

The Use of Unsaturated Fluorocarbons for Dielectric Etch Applications

Chatterjee, Ritwik, Karecki, Simon, Reif, Rafael, Vartanian, Victor, Sparks, Terry
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Volume:
149
Year:
2002
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1457988
File:
PDF, 1.83 MB
english, 2002
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