A Multiscale Elastohydrodynamic Contact Model for CMP

Journal of The Electrochemical Society 2003 Vol. 150; Iss. 9

A Multiscale Elastohydrodynamic Contact Model for CMP

Kim, Andrew T., Seok, Jongwon, Tichy, John A., Cale, Timothy S.
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Volume:
150
Year:
2003
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1598215
File:
PDF, 346 KB
english, 2003
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