Symmetric Gate-Overlapped LDD Poly-Si TFTs with Selective...

Electrochemical and Solid-State Letters 2004 Vol. 7; Iss. 2

Symmetric Gate-Overlapped LDD Poly-Si TFTs with Selective and Isotropic Deposited Ni Sub-gate

Chen, Bo-Ting, Tseng, Chang-Ho, Cheng, Huang-Chung, Chao, Chi-Wei, Chang, Ting-Kuo, Lu, Jian-Hao, Chin, Albert
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Volume:
7
Year:
2004
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1635672
File:
PDF, 242 KB
english, 2004
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