Analytical Dishing and Step Height Reduction Model for CMP With a Viscoelastic Pad
Guo, Yongjin, Chandra, Abhijit, Bastawros, Ashraf-F.Volume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1774189
File:
PDF, 254 KB
english, 2004