Structural and Electrical Properties of Ultralow-k,...

Journal of The Electrochemical Society 2004 Vol. 151; Iss. 10

Structural and Electrical Properties of Ultralow-k, Disordered Mesoporous Silica Films Synthesized Using Nonionic Templates

Yamada, Kazuhiro, Oku, Yoshiaki, Hata, Nobuhiro, Seino, Yutaka, Negoro, Chie, Kikkawa, Takamaro
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Volume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1795258
File:
PDF, 960 KB
english, 2004
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