Development of a Method for Resist Removal by Ozone with Acetic Acid Vapor
Noda, Seiji, Kawase, Kazumasa, Horibe, Hideo, Kuzumoto, Masaki, Kataoka, TatsuoVolume:
152
Year:
2005
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1833311
File:
PDF, 646 KB
english, 2005