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Damascene Chemical-Mechanical Polishing Characterization and Modeling for Polysilicon Microelectromechanical Systems Structures
Tang, Brian D., Xie, Xiaolin, Boning, Duane S.Volume:
152
Year:
2005
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1933542
File:
PDF, 1.23 MB
english, 2005