Numerical Simulation of Electrochemical Planarization of Copper Overburden
West, Alan C., Shao, Ingrid, Deligianni, HarikliaVolume:
152
Year:
2005
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2001227
File:
PDF, 222 KB
english, 2005