A Deep Level Transient Spectroscopy Study of the Internal Gettering of Cr in Czochralski-Grown Silicon: Efficiency and Reversibility upon Lamp Pulse Annealings
Chabane-Sari, N. -E.Volume:
139
Year:
1992
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2069003
File:
PDF, 709 KB
english, 1992