Behavior of a-SiN:H and a-SiON:H Films in Condensed Water

Behavior of a-SiN:H and a-SiON:H Films in Condensed Water

Osenbach, J. W.
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Volume:
139
Year:
1992
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2069076
File:
PDF, 605 KB
english, 1992
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