[ECS 210th ECS Meeting - Cancun, Mexico (October...

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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - High-Rate Anisotropic Silicon Etching with the Expanding Thermal Plasma Technique

Blauw, Michiel A., Van Lankvelt, Peter, Roozeboom, F., Kessels, Erwin, van de Sanden, Richard
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Volume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2357269
File:
PDF, 565 KB
english, 2006
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