Selective Silicon Epitaxy and Orientation Dependence of...

Selective Silicon Epitaxy and Orientation Dependence of Growth

Rai-Choudhury, P., Schroder, D. K.
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Volume:
120
Year:
1973
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2403529
File:
PDF, 1.63 MB
english, 1973
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