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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Integration Solutions for 65 nm Back End of Line Defect Reduction and Manufacturability
Hichri, Habib, Oakley, Jennifer S., Grunow, Sarah L., Bunke, C., Kelp, J., Fang, R., Kulkarni, D., Angyal, M., Houghton, T., Santiago, A., Kumar, K., Majors, C., Fitzsimmons, J., Nye, H., Watts, DavidVolume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2778384
File:
PDF, 561 KB
english, 2007