[ECS 212th ECS Meeting - Washington, DC (October 7 -...

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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Verification of a Method to Detect Grown-in Oxide Precipitate Nuclei in Czochralski Silicon

Kissinger, Gudrun, Sattler, Andreas, Dabrowski, Jarek, Von Ammon, Wilfried
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Volume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2778658
File:
PDF, 152 KB
english, 2007
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